Hafnium (IV) Chloride Powder

HfCl₄, > 98% pure (excluding Zr)

Hafnium (IV) chloride is the inorganic compound with the formula HfCl₄. This colorless solid is the precursor to most hafnium organometallic compounds. It functions as a Lewis acid and catalyst for certain alkylation and isomerism reactions. Hafnium and zirconium compounds are extracted from ores together and have very similar properties. The most common contaminant in HfCl₄ is therefore ZrCl₄, and commercial samples can contain several percent zirconium.

HfCl₄ is the most common precursor for chemical vapor deposition of hafnium dioxide and hafnium silicate, used as high-k dielectrics in manufacture of modern high-density integrated circuits.

Formula                                               HfCl₄

CAS Number                                      13499-05-6

Molecular Weight                              320.30

Color                                                    White

Form                                                    Powder

Available Purities                               98 – 99.99%

Total Metallic Impurities                   1.9% maximum

Zirconium content                             0.5 – 3.5% typically

(This product is a hazard for shipping: UN3260, CL 8, PG III, corrosive solid, inorganic, NOS)