Bayville Chemical Supply Company Inc 70-G East Jefryn Boulevard Deer Park, New York, 11729 USA Telephone: 631-586-4309 Fax: 631-254-5591 E-Mail:
Bayville Chemical Supply Company Inc70-G East Jefryn BoulevardDeer Park, New York, 11729  USA           Telephone: 631-586-4309      Fax: 631-254-5591      E-Mail: 


Silicon Sputter Targets


Bayville Chemical offers Silicon Sputter Targets, Boron doped Silicon Sputter Targets and Silicon / Aluminum Sputter Targets for thin film and coating applications.





Sputtering Method:

RF Sputtering

DC Sputtering


99% - 99.9999%

99.999% - 99.9999%

Dopant Content

Undoped or

Boron: 30 - 450 ppm



0.002 - 0.05 Ohm cm

Crystal Structure

Single or polycrystalline



Silicon /Metal Composite



Al, (Ti, Cu, Ce, Y, La)

Metal Content

0.5 - 40 % wt.


99% - 99.999%

Aluminum is a standard, other metals upon request


Manufacturing Method:

Production of sputtering targets from Undoped or Boron doped Silicon includes CZ growth of ingots with annealing, material analysis, cutting and machining, polishing, certification and packaging. Silicon / Metal composite targets are  manufactured by a variety of methods (casting, HIP, vacuum pressing), depending on the composition.



Backing Plates and Bonding:

We supply many standard OFHC Copper backing plates for commercially available sputtering and cathodic arc deposition systems, as well as custom designs. Both Metallic and Epoxy Bonding of Silicon tiles is available.


Where to Find Us:

Bayville Chemical
70 East Jefryn Boulevard
Suite G
Deer Park, NY 11729

Phone: 631 586-4309

What's New

New larger location

As of August 2014, we have moved to this new, larger, modern facility to better service your needs.


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