Bayville Chemical Supply Company Inc 70-G East Jefryn Boulevard Deer Park, New York, 11729 USA Telephone: 631-586-4309 Fax: 631-254-5591 E-Mail: info@bayvillechemical.net
Bayville Chemical Supply Company Inc70-G East Jefryn BoulevardDeer Park, New York, 11729  USA           Telephone: 631-586-4309      Fax: 631-254-5591      E-Mail: info@bayvillechemical.net

 

Silicon / Aluminum Sputter Targets,

5 - 10% wt. Al

Purity:               99.9% - 99.9999%

Resistivity:      0.002 - 0.1 Ohm cm

 

Silicon with Aluminum addition is used for industrial deposition of thin films by sputtering for applications which do not require highest purity of deposition materials (glass coating).  The targets from pure Silicon (undoped or Boron doped) may develop cracks as a result of local overheating in the process of DC magnetron sputtering.  Addition of Aluminum provides excellent conductivity, uniform heat field distribution, eliminates local overheating and prolongs the target life.

 

Specification:

 

                                       Rectangle           Disk            Assembly

                                (diagonal)      (diameter)               

Maximum Size      310 mm (12")    203 mm (8")   Not Limited

 

Surface Finishing  Lapped,

                                Etched,

                                Polished: 2/4 micron

                               (32 / 63 microinch) RMS

 

Standard Tolerances:  

 

Rectangular Side:          +/- 0.10 mm

Disk Diameter:               +/- 0.10 mm

Flatness:                        +/- 0.05 mm

Thickness:                      +/- 0.05 mm

Diagonal Variation:         +/- 0.30 mm

 

Relationship between Aluminum content and target material Resistivity and porosity

 

% Weight of Aluminum     Resistivity (ohm cm)(x 10-4)         Porosity, (%)

3                                                       5.7                                         7.8

5                                                       4.0                                         7.0

7                                                       3.6                                         6.2

9                                                       3.4                                         5.0

11                                                     3.0                                         4.2

13                                                     2.8                                         3.6

15                                                     2.0                                         2.6

 

Where to Find Us:

Bayville Chemical
70 East Jefryn Boulevard
Suite G
Deer Park, NY 11729


Phone: 631 586-4309

What's New

New larger location

As of August 2014, we have moved to this new, larger, modern facility to better service your needs.

 



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