UHP Grade, 99.998% pure vol% minimum
(excluding SiH4 and higher Silanes)
Disilane is a pyrophoric, colorless gas. It is used for rapid low temperature deposition of epitaxial silicon, amorphous silicon and silicon-based dielectrics. Disilane is usually shipped as a pure liquefied gas or in mixtures with helium or hydrogen.
CAS Number: 1590-87-0
Molecular Weight: 62.22
Boiling Point: -14.5oC (1 atm)
Specific Volume: 0.3367 l/g (-14.5oC)
Critical Temperature: 150.85oC
Resistivity: > 1000 ohm cm (n-type)
Pressure: 33 psig (20oC)
Synonyms: Disilicane, Silicon
Major Hazards Pyrophoric
Flammable Limits LFL: 0.2%, UFL: Unknown
Exposure Limit 5 ppm (estimated)
UN Number UN3161 (liquefied)
DOT Class 2.1 (Flammable Gas)
Proper Shipping Name Liquefied Gas,
Flammable, nos (Disilane)
Maximum Impurities (Gas Phase):
O2 +Ar 1 ppmv
N2 2 ppmv
Siloxanes 5 ppmv
Higher Silanes 50 ppmv
Chlorosilanes 0.2 ppmv
SiH4 1000 ppmv
CH4 1 ppmv
CO2 1 ppmv
H2O 1 ppmv
Flammable gas, Category 1
Gas under pressure, Compressed gas
Acute Toxicity (Inhalation), Category 4
GHS LABEL ELEMENTS
Signal Word DANGER
Extremely flammable gas
Contains gas under pressure; may explode if heated
Harmful if inhaled
Keep away from heat, sparks, open flame, and hot surfaces - No smoking. Avoid breathing gas. Use only outdoors or in a well-ventilated area.
Leaking gas fire: Do not extinguish, unless leak can be stopped safely. Eliminate all ignition sources if safe to do so. IF INHALED: Remove victim to fresh air and keep at rest in a position comfortable for breathing. Call a POISON CENTER or doctor/physician if you feel unwell.
Store in a well-ventilated place. Protect from sunlight.
Other Hazards which do not Result in Classification
May cause asphyxia. May cause frostbite upon sudden release of compressed gas
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