Bayville Chemical Supply Company Inc 70-G East Jefryn Boulevard Deer Park, New York, 11729 USA Telephone: 631-586-4309 Fax: 631-254-5591 E-Mail:
Bayville Chemical Supply Company Inc70-G East Jefryn BoulevardDeer Park, New York, 11729  USA           Telephone: 631-586-4309      Fax: 631-254-5591      E-Mail: 

Hexamethyldisilazane, 99+%





Hexamethyldisilazane is used as a solvent in organic synthesis and organometallic chemistry. It is often used as an adhesion promoter for photoresist in photolithography. Further, it is used for the preparation of trimethylsilyl ethers from hydroxy compounds. It is used as an alternative to critical point drying during sample preparation in electron microscopy. It is added to analyte to get silylated diagnostic products during pyrolysis in gas chromatography- mass spectrometry.

Highly flammable. Moisture sensitive.


MDL:                          MFCD00008259

EINECS:                    213-668-5


Chemical Properties:

IUPAC name



HMDS, Bis(trimethylsilyl)amine


C6H19NSi2     [(CH3)3Si]2NH

CAS Number



Colorless Liquid

Color Test

≤ 10 APHA



Purity (GC)

≥ 99.0%

Formula Weight



0.774 gm/cm3

Melting point

-78° C

Boiling Point

126° C

Flash Point

8°C (46°F)

Refractive Index

1.4055-1.4095 @ 20°C

Infrared Spectrum

Conforms to Structure


Storage & Sensitivity: Moisture Sensitive. Store under Nitrogen. Ambient temperatures.

Solubility: Miscible with methanol, chloroform, ethyl ether and benzene. Immiscible with water.  

Incompatibility: Incompatible with strong oxidizing agents and strong acids.  

Shelf Life:  3 years if stored, unopened under recommended conditions.

Hazardous For Shipping:

UN3286, CL 3(6.1, 8), PG II, Flammable Liquid, Toxic, Corrosive N.O.S.


Where to Find Us:

Bayville Chemical
70 East Jefryn Boulevard
Suite G
Deer Park, NY 11729

Phone: 631 586-4309

What's New

New larger location

As of August 2014, we have moved to this new, larger, modern facility to better service your needs.


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